High Dynamics with Large Aperture
• Parallel kinematics for faster response times and higher multi-axis accuracy
• Zero-play, high-precision flexure guide system
• Outstanding lifetime due to PICMA® piezo actuators
• Clear aperture 66 mm × 66 mm
• Highest linearity due to capacitive sensors

• Metrology
• Interferometry
• Photonics / integrated optics
• Lithography
• Nanopositioning
• Scanning microscopy
• Sample alignment
• Micromachining

Subnanometer resolution with capacitive sensors
Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion, long-term stability, and a bandwidth in the kHz range.

Automatic configuration and fast component exchange
Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are stored in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data each time the controller is switched on.

Outstanding lifetime thanks to PICMA® piezo actuators
The patented PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Parameter Name	Parameter Value
Orientation	Z-axis, tilt
Type	piezo
Number of axes	1-axis 3-axis
Other characteristics	high-accuracy for microscopes frictionless guided closed-loop with controller automatic
Stroke (mm)	50 - 50