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XY stage EZ-0715

About


The EZ-0715 Gantry Stage is designed for high precision applications. Incremental measuring systems (Heidenhain LIP6 G0) and an optimized design allow a positioning accuracy of ± 250 nm and a repeatability of ± 25 nm for the single axes. The vacuum-preloaded slide and optimized mass distribution enable high rigidity in the smallest installation space. Ironless motors enable an acceleration of up to 10 m/s2 and a travel speed of up to 1 m/s. The end position is detected by inductive sensors. The slides are supplied with energy separately via symmetrically attached drag chains. The machine bed of the Gantry Stage is made of granite. Both axes can be customized. The XY system can be expanded to include a Z- and/or C-Axis.



PARAMETERS

Parameter Name Parameter Value
Orientation
XY
Number of axes
2-axis
Other characteristics
precision
Stroke (mm)
350 - 450
Speed (mm/s)
500 - 500
Load (kg)
0 - 25