The larger of the two TRIPOD is compatible with the CLS-92 Modular System.

A tip-tilt stage is the core component of this positioning system. The arrangement of the three turrets allows a roll and pitch motion of the top plate in the range of ±13° for Θx, ±15° for Θy and a linear translation in the Z direction of 10 mm. The top plate also includes a slot to mount a SR-4011 rotation stage to add a fourth degree of freedom to the setup. The bottom plate on the contrary allows a direct mounting to a breadboard or a XY platform consisting of two CLS-92 linear translation stages. The later possibility yields to a 5D or together with the SR-4011 to a 6D positioning system.

Mechanical
Travel [mm] - 63 (X); 63 (Y); 10 (Z)
Travel [ - 26 (Θx); 28 (Θy); unlimited (Θz)
Max. Normal Force [N] - 5
Max. Horizontal Force [N] - 2.5
Dimensions [mm] - 142 x 142 x 94
Height of Platform above Ground [mm] - 94
Weight [g] - ~ 1850

Closed-Loop
Sensor Types - S
Smallest Increment [nm] - 1
Smallest Increment [µrad] - 1
Closed-Loop Repeatability, Full Stroke MCS2 [nm] - < ± 200
Closed-Loop Repeatability, 1 mm Travel MCS2 [nm] - < ± 10
Closed-Loop Repeatability, Full Stroke MCS2 [µrad] - < ± 15

Options
Vacuum Options - HV (1E-6 mbar)

Parameter Name	Parameter Value
Number of axes	XY
Features	tripod
Applications	vacuum
Stroke (mm)	6 - 31