The TRIPOD 52-6DoF is compatible with the CLS-52 Modular System and consists of a tip-tilt stage, like its larger equivalent, the TRIPOD 92-6DoF

The arrangement of the three turrets allows a roll and pitch motion of the top plate in the range of ±8.5° for Θx, ±9.5° for Θy and a linear translation in the Z direction of 5 mm. The top plate includes a mounting slot for a SR-3211 rotation stage to add a fourth degree of freedom to the setup. The bottom plate on the contrary allows a direct mounting to a breadboard or a XY platform consisting of two CLS-52 linear translation stages. The later possibility yields to a 5D or together with the SR-3211 to a 6D positioning system.

Mechanical
Travel [mm] - 31 (X); 31 (Y); 5 (Z)
Travel [ - 17 (Θx); 19 (Θy); unlimited (Θz)
Max. Normal Force [N] - 5
Max. Horizontal Force [N] - 2.5
Dimensions [mm] - 90 x 90 x 80
Height of Platform above Ground [mm] - 80
Weight [g] - ~ 550

Closed-Loop
Sensor Types - S
Smallest Increment [nm] - 1
Smallest Increment [µrad] - 1
Closed-Loop Repeatability, Full Stroke MCS2 [nm] - < ± 200
Closed-Loop Repeatability, 1 mm Travel MCS2 [nm] - < ± 10
Closed-Loop Repeatability, Full Stroke MCS2 [µrad] - < ± 15

Options
Vacuum Options - HV (1E-6 mbar); UHV / UHVT (1E-11 mbar)
Non-Magnetic Option - Yes (-NM)

Parameter Name	Parameter Value
Number of axes	XY
Features	tripod
Applications	vacuum
Stroke (mm)	6 - 31