About
Fiber optic temperature sensing for semiconductor in etch and deposition applications
The Advanced Energy's Luxtron® M-1100 is the latest FluorOptic® thermometry (FOT) converter platform, featuring an advanced light source and improved ultralow noise electronics. Two new proprietary phosphor formulations VioLuxTM and RubiLuxTM have been developed to deliver 0.5°C accuracy, repeatability, and stability over an extended range -200 to 450°C
Measurement range from -200 to 450°C to support advanced etch processes
Advanced low-noise electronics and algorithms give precision better than 0.05°
AccuDisc™ sensors enable sensor to be separate from the probe enabling greater accuracy and repeatability
Experienced team to support custom probe development for OEMs
Compact, DIN-rail size to minimize footprint when integrated into tools and equipment
Immune to electromagnetic interference from EMI, RF, high voltage and microwave sources
Benefits
Non-contact measurement to minimize the thermal offset
Easy to install into OEM equipment
Features
Wide supported temperature range
Low noise level with fast response rate
5 channels in a single converter
Flexible communication outputs
PARAMETERS
| Parameter Name | Parameter Value |
|---|---|
| Type |
temperature
|
| Bus |
fiber optic
|
| Other characteristics |
|
