FluorOptic Temperature Converter for measurements between -200 to 450 °C in semiconductor applications.
The Luxtron® M-1000 is Advanced Energy’s newest FluorOptic® Thermometry (FOT) converter platform enabling accurate temperature measurement as low as -200 °C and up to 450 °C for advanced semiconductor applications in etch and deposition.

Advanced low-noise electronics and algorithms give precision better than 0.05 °C
AccuDisc™ sensors enable sensor to be separate from the probe enabling greater accuracy and repeatably
Experienced team to support custom probe development for OEMs
Compact, DIN-rail size to minimize footprint when integrated into tools and equipment

Advanced Energy’s Luxtron® FluorOptic Temperature (FOT) Sensors use the principles of phosphorescence to deliver high-accuracy temperature monitoring for critical semiconductor applications such as plasma etch and plasma enhanced deposition. The sensors are immune to interference from RF and microwave sources, enabling the sub-1 °C process control required to achieve device performance and yield for leading edge semiconductor devices.

The Luxtron M-1000 is the latest FOT converter platform, featuring an advanced light source and improved electronics for ultralow noise. In addition, two new proprietary phosphor formulations, VioLux™ and RubiLux™, have been developed to work in concert with the M-1000 to deliver sub-0.5 °C accuracy, repeatability, and stability over an extended range -200 to 450 °C (-328 to 842 °F). This extended temperature range enables both cryogenic and high temperature etch processes, both of which are critical for etching advanced high aspect ratio devices, such as 3D NAND.

Parameter Name	Parameter Value
Type	temperature
Bus	fiber optic
Applications	for fluoroptic sensor