About
Series 1 robots are designed for wafer handling. The modular system allows the combination of various base bodies, from 7" to 21" Z stroke, with a large number of different arm modules from 10.5" to 28". Handling weights of up to 3 kg are also possible with the appropriate combination of axes.
PARAMETERS
| Parameter Name | Parameter Value |
|---|---|
| Type |
SCARA
|
| Function |
for wafer handling
|
| Payload (kg) |
0 - 1
|
| Repeatability (mm) |
0.02 - 0.02
|
Offer by
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