● Apply to 156/230 size wafers
● Compatible to different brands of wafer diffusion equipment and different sizes of quartz boat

Features :
● Loading and unloading: Cassette
● Output: quartz boat
● Optional online square resistance,detection, hydrophilicity test, missing piece detection, and water piece detection
● Optional support MES interface and remote debug function
● OEE statistics & Energy consumption analysis
● Ceramic sucker, ceramic quick insert top gear
● Standard ion split air knife
● Optional support MES function and remote diagnosis function
● Optional smart IGV interface
● Intelligent machine, OEE statistics and energy consumption analysis function

Parameter Name	Parameter Value
Options	for production process