Process :
● Apply to 156/230 size wafers
● Compatible to different sizes of tube PECVD equipment and plate PECVD equipment

Features :
● Loading and unloading ： Cassette or Stack
● Loading and unloading: Cassette or Stack
● Output: graphite boat
● Boat temperature monitoring
● Optional online color difference/film thickness detection, PL detection, debris detection,
● warped film detection, flip
● Optional support MES interface and remote debug function
● Intelligent machine, OEE statistics and energy consumption analysis function
● Standard boat temperature detection, vertical shooting boat, ceramic suction cup,
● single-channel vacuum
● Optional smart IGV interface

Parameter Name	Parameter Value
Options	for production process