XYZ dual inspection portal for semiconductors
Customizable

• Ideal for automated inspection of wafers / semiconductors
• Very large travel range of 2 x 720 x 720 x 100 mm each
• Allows the integration of two processes simultaneously

This inspection system consists of four clean room axes and allows the automated measurement of multiple objects simultaneously. High dynamics and highest reproducibility are achieved. One high-resolution camera or sensor per side is moved relative to the sample to inspect geometries, perform measurements and document special quality features.

Specifications
- Stroke: 2 x each 720 x 720 x 100 mm
- 2x X-axes each for scanners / microscopes up to 25 kg
- 2x Y-axes each for chucks up to 23 kg / wafers up to 12" / 300 mm
- repeatability: 1.5 - ± 0.3 µm
- Speed: 750 - 1500 mm (XY) / 150 - 300 (Z)
- Max. load: 150 N (XY) / 200 N (Z)
- Drive: linear motor (ironless), profile rail (XY) | ball screw, AC servo (Z)
- Feedback: linear scale, motor encoder
- Motion Controller: FMC-250/280, ACS, PLC integration
- Clean room class: ISO 2

Customized options:
- Process adaptation, sample holder, head / sensor
- Versions for clean room ISO 14644-1 (up to class 1 on request)
- Rack, vibration isolation, enclosure, safety concept
- Connections for suction and circulating belt covers
- Extension of degrees of freedom for XYZ-Rx-Ry-Rz motions
- Individual solution finding with 3D design for the positioning task

Parameter Name	Parameter Value
Number of axes	multi-axis XYZ 4-axis
Features	linear, automatic, vertical, horizontal, portal
Applications	for robots industrial multi-function for wafer inspection and metrology for the semiconductor industry for clean rooms for hygienic applications for optical applications for microscopy for sample preparation for quality control PCB
Other characteristics	servo controlled compact ball screw USB high-resolution linear motor-driven servo-driven combined modules large aperture profiled rail high-speed for granite slabs precision with controller
Repeatability (mm)	0.3 - 0.3
Load (kg)	5 - 20
Stroke (mm)	100 - 720
Speed (mm/s)	150 - 1500