XYZ Gantry for highly dynamic applications
Customizable

• Ideal for high precision and dynamic applications
• Very large travel range of 1300 x 800 mm
• High accelerations and speeds combined with high precision

This gantry enables highly dynamic movements across an area of 1300 x 800 mm. The customized processing head or sensor on Z-axis moves quickly, smoothly over the carriers on the granite. The profiled rail guides are mounted directly on the granite to provide optimum running characteristics for tremendously repeatable sub-micron results.

Specifications
- Stroke: 800 x 1300 x 200 mm
- Repeatability: 1 - 0.7 µm
- Speed: 500 - 1000 mm (XY) / 50 - 100 (Z)
- Max. Load: 150 N (Z)
- Drive: Linear Motor, Profile Rail (XY) / Ball Screw, AC Servo (Z)
- Feedback: linear scale
- Motion Controller: FMC series, ACS, PLC integration

Customized options:
- Process adaptation, sample holder, head / sensor
- Versions for clean room ISO 14644-1 (up to class 1 on request)
- Rack, vibration isolation, enclosure, safety concept
- Extension of degrees of freedom for XYZ-Rx-Ry-Rz motions
- Individual solution finding with 3D design for the positioning task

Parameter Name	Parameter Value
Number of axes	multi-axis XYZ 2/3-axis
Features	linear, automatic, vertical, horizontal, portal, laser, optical
Applications	multi-function industrial for wafer inspection and metrology for the semiconductor industry for welding for clean rooms for fiber optics for cutting machine optical beam PCB for hygienic applications for 3D printers for laboratory applications X-ray for quality control for optical applications for sample preparation
Other characteristics	servo-driven compact ball screw high-resolution USB servo controlled adjustable synchronized for granite slabs with controller high-speed linear motor-driven precision combined modules large aperture for heavy loads for mirrors profiled rail
Repeatability (mm)	0.7 - 0.7
Load (kg)	1 - 100
Stroke (mm)	200 - 1000
Speed (mm/s)	50 - 1500