• Actuator resolution to 8 nm
• Minimum incremental motion to 0.25 µm in X, Y, and Z
• BLDC motors and absolute encoders
Parallel-kinematic design for six degrees of freedom making it significantly more compact and stiff than serial-kinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction.
Absolute encoder
Absolute encoders supply explicit position information that enables immediate determination of the position. This means that referencing is not required during switch-on, which increases efficiency and safety during operation.
Brushless DC motor (BLDC)
Brushless DC motors are particularly suitable for high rotational speeds. They can be controlled very accurately and ensure high precision. Because they dispense with sliding contacts, they run smoothly, are wear-free and therefore achieve a long lifetime.
Fields of application
Research and industry. For microassembly, biotechnology, semiconductor manufacturing, optical alignment.