About
Versatility for high pressure applications across a wide flow measurement range.
The Brooks model 5866RT metal or elastomer sealed pressure controller and flow meter controls pressure while also measuring flow rate. Model 5866RT receives a remote pressure transducer signal, and using adjustable integral PID control electronics and control valve, will maintain a desired set pressure. With options in seals, electro-polished wetted surfaces and a wide pressure and flow measurement range, 5866RT delivers proven results across a broad range of processes.
Features
• Integral pressure transducer
• Response time: <0.8 seconds
• Wide flow measurement range with full-scale flow rates from 0 - 3 sccm to 0 – 30,000 sccm
• Optional metal seal available
• Electro-polished wetted surfaces (optional)
• Electrically activated valve override
• Suitable for upstream or downstream control
• Analog interface
Benefits
• Eliminates droop, hysteresis and boost
• High leak integrity
• More control over pressure and flow
• Dynamic tuning adjustments with top mounted DIP switches
Applications
Thin-film processes
Chemical research
Petrochemical research
Laboratory
Fuel cell
Life science
PARAMETERS
| Parameter Name | Parameter Value |
|---|---|
| Applications |
flow
|
| Other characteristics |
adjustable
|
