About
The mPR series is a miniature precision direct drive rotary stage with integrated high precision rotary bearing, high resolution rotary encoder, and 3 phase AC servo motor. It has been engineered to deliver a combination of modularity, flexibility, and performance in an extremely compact package. The mPR is available in two form factors – 80mm and 104mm diameters. The combination of size, high precision, and all the features mentioned above make the mPR the ideal positioner for a number of high tech industries. The mPR's low profile and high precision make it ideal for applications in metrology systems, laser processing/machining, electronics manufacturing, and semiconductor manufacturing. The mPR 80 has common mounting feature to that of the MX80, and mSR 80/100, and the mPR 100 size has common mounting features to that of the 404XR for complete multi-axis systems.
Markets:
• Life Science
• Electronics manufacturing
• Semiconductor
• Optics
Features/Benefits:
• mPR 80: 80 mm dia. X 75 mm
• mPR 100: 104 mm dia. X 90 mm tall
• Continuous 360-degree operation
• Four encoder resolutions (3 digital incremental, 1 analog sine/cosine)
• Dowel holes in top and base for repeatable pinning
• Through hole aperture
• Direct mounting features to MX, mSR, and XR stages
• 3 meter, high flex cables
• Lightweight aluminum construction
Applications:
• Cleanroom
• Metrology
• Focusing
PARAMETERS
| Parameter Name | Parameter Value |
|---|---|
| Type |
electric
|
| Orientation |
rotary
|
| Number of axes |
multi-axis
|
| Technology |
|
| Other characteristics |
|
| Rotational speed (rpm) |
300 - 300
|
