About
High acceleration and dynamics and ideal for applications that demand peak force or low heat output.
The Vacuum ULV – G2 series is the medium-size series in the high-end vacuum-rated linear motor series. They are commonly used for applications demanding peak force or low heat output.
Such as in lithography and inspection solutions. In longer strokes, ULV – G2 coils can be combined to save magnet material but still achieve high performance.
PARAMETERS
| Parameter Name | Parameter Value |
|---|---|
| Type |
|
| Voltage (V) |
230 - 320
|
| Other characteristics |
|
| Speed (mm/s) |
5000 - 13600
|
| Force (N) |
719 - 720
|
Offer by
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