Introducing the product lineup of design based metrology system

RecipeDirector:
CD-SEM recipe automatic creation utilizing design data

DesignGauge-Analyzer(DG-A):
Supporting OPC evaluation and optimizing pattern measurement in Lithography process

Features
Off-line recipe creation without using a wafer and CD-SEM
Automatic recipe creation by specifying measurement points and methods
High Quality Recipes(Consistent - not dependent on operator skill)
Server/Client style

Parameter Name	Parameter Value
Technology	CD-SEM
Other characteristics	measurement automatic