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Anti-static control system eFLOW®

About


Device to control the specific resistance value of DI water by a method for supplying carbon dioxide through “hollow fiber gas permeation membrane” originally developed by DIC Corporation.
◎ Prevents redeposition of contaminants due to static electricity
◎ Prevents electrostatic destruction of substrate pattern



PARAMETERS

Parameter Name Parameter Value
Function
resistivity
Type/technology
CO2 permeation
Product applications
for water treatment
Other characteristics
anti-static